With this paper, the new lapping slurry and sprucing slurry are released. As well as the deliquescence diploma of CLBO is fallen to most affordable. A different Functioning technology can also be adopted. Soon after tough sharpening, the focus of extremely-precision sharpening slurry is greater thoroughly. So does the extremely-precision sharpening pace, and the wiping speed is faster compared to the deliquescence pace. The CLBO crystal surface area roughness can realize 1nm and continue to keep the area quality effectively. Access through your institution
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As an example, The present concave OC could be replaced by a airplane mirror which could mitigate the ability density around the surface of M1 and the diamond. In addition, utilizing high destruction threshold coatings for M1 and diamond would also Enhance the output energy with no damages. Then, the NIR laser on the 2nd Stokes wavelength might be superior plenty of, along with its great beam top quality, to deliver the final DUV laser at 193 nm using a significant average electrical power.
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Both the 1040 nm and 1078 nm laser originate from one particular twin-wavelength Yb-doped fiber laser. Every single laser is amplified by phases of fiber amplifier and Yb-doped components amplifier, respectively.
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Tunable ultraviolet laser supply based upon stable-condition dye laser know-how and CsLiB6O10 harmonic technology
The conversion performance from elementary NIR to DUV is from 5% to 36% based on the noted brings about Table one. Growing the conversion effectiveness will lessen the load on the look and set up of the fundamental laser amplifier and also the electric electric power use. An excellent beam excellent of the fundamental laser may also lead to your increasing from the conversion efficiency and also the suitable ability depth of your NIR and environmentally friendly laser in the SHG and FHG procedure, respectively. The highest conversion efficiencies from NIR to green and environmentally friendly to DUV laser by usage of CLBO crystal are 70% and around fifty%, respectively [twelve], which corresponds into the conversion performance of 35% from elementary to DUV.
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